10.18453/rosdok_id00005687 Küster, Alexandra Alexandra Küster http://d-nb.info/gnd/1414559291 https://orcid.org/0009-0007-6717-7977 Universität Rostock 2025 621.3 Electrical Engineering, Electronics 2025 en https://purl.uni-rostock.de/rosdok/id00005687 urn:nbn:de:gbv:28-rosdok_id00005687-8 MEMS sensors have become an integral part of everyday life. The contradiction of increasing complexity by integrating microcontrollers to enable new use cases and the short time-to-market requirements puts high pressure onto the development flow. The thesis at hand deals with methodologies for the modeling and usage of heterogeneous virtual prototypes, i.e. system-level models that enable the joint simulation of all domains of a smart sensor. Their impact onto the development flow of smart sensors is demonstrated and methodologies to enhance the simulation performance are provided.